Axcelis Announces New 'Purion Power Series' Family Of Implanters To Support Growing Power Device Market

BEVERLY, Mass., July 9, 2018 — (PRNewswire) —  Axcelis Technologies, Inc. (Nasdaq: ACLS), a leading supplier of innovative, high-productivity solutions for the semiconductor industry, announced today that it has released a new Purion Power Series™ product family to meet the growing market demand for the power device market.  This new product family, which includes the Purion M Power Series™ for medium current, the Purion H Power Series™ for high current and the Purion XE Power Series™ for high energy, was developed with enabling technology to specifically address the unique needs of emerging power device applications.

Axcelis Technologies, Inc. (PRNewsFoto/Axcelis Technologies, Inc.) (PRNewsFoto/)

Bill Bintz, executive vice president, product development, commented, "We're excited to offer a comprehensive solution to our power device manufacturing customers. The Purion Power Series family is uniquely suited to excel at these applications due to its innovative platform that offers the flexibility to handle multiple wafer sizes from 150mm to 300mm as well as various substrates including Si and SiC, along with its precision wafer temperature control technology, all accomplished while delivering the industry's highest throughput and capital efficiency."

John Aldeborgh, executive vice president, customer operations, commented, "Power devices are one of the fastest growing segments in IC manufacturing, due to the robust e-mobility and renewable energy markets.  Customer inquiries and demand for Purion products serving this very active market have increased, driving significant opportunity for the Purion Power Series family of products."

About Axcelis:
Axcelis (Nasdaq: ACLS), headquartered in Beverly, Mass., has been providing innovative, high-productivity solutions for the semiconductor industry for 40 years. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life cycle support of ion implantation systems, one of the most critical and enabling steps in the IC manufacturing process. Learn more about Axcelis at www.axcelis.com.

CONTACTS:
Maureen Hart (editorial/media) 978.787.4266
Doug Lawson (investor relations) 978.787.9552

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SOURCE Axcelis Technologies, Inc.

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Company Name: Axcelis Technologies, Inc.
Web: http://www.axcelis.com
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