Therma-Wave Wins Fab Expansion Repeat Metrology Orders

FREMONT, Calif.—(BUSINESS WIRE)—June 20, 2006— Therma-Wave, Inc. (Nasdaq: TWAV), a world-wide leader in the development, production and sale of process control metrology systems used in the manufacture of semiconductors, announced today that the Company received multi-tool fab metrology orders for its Opti-Probe(R) thin-film measurement tools from a leading commodity manufacturer. Therma-Wave has already made initial shipments of its Opti-Probe OP7341XP tools to the customer under these orders to support the expansion of their semiconductor production processes.

"We are pleased to announce these major follow-on orders for our advanced Opti-Probe tools which expand upon this customer's significant installed base of Therma-Wave metrology solutions. Our leading edge tools provide seamless tool-to-tool and fab-to-fab matching and are backed by a proven field and applications support team with resources located world-wide. These orders and deliveries reflect our customer's ongoing confidence in expanding their deployment of Therma-Wave metrology solutions to support their front-end and back-end metrology applications throughout the fab," commented Brian Renner, vice president of sales at Therma-Wave.

About Therma-Wave, Inc.

Since 1982, Therma-Wave, Inc. has been revolutionizing process control metrology systems through innovative proprietary products and technologies. The Company is a world-wide leader in the development, manufacture, marketing and service of process control metrology systems used in the manufacture of semiconductors. Therma-Wave currently offers leading-edge products to the semiconductor manufacturing industry for the measurement of transparent and semi-transparent thin films; for the measurement of critical dimensions and profile of IC features; and for the monitoring of ion implantation and activation processes. Further information about Therma-Wave, Inc., is available from the Company's web site at:

Safe Harbor Statement

This press release contains forward-looking statements that involve risks and uncertainties, as well as assumptions that, if they do not fully materialize or prove incorrect, could cause our actual results to differ materially from those expressed or implied by such forward-looking statements. Such forward-looking statements include our ability to convert these orders into revenue. Factors that could cause actual results to differ materially from the forward-looking statements include the cyclicality of our business, the loss of one or more large customers, the cancellation of one or more orders by our customers, our ability to protect our intellectual property, our ability to successfully compete against larger companies, our ability to access additional capital in the future, our ability to develop new and advanced products in the future, our ability to attract and retain key personnel, our ability to receive supplies from single source suppliers, business decisions by third parties, that are out of our control, disruptions at our manufacturing facilities and general political, economic and stock market conditions and events, both domestically and internationally. These factors and others are described in more detail in our public reports filed with the Securities and Exchange Commission, such as those discussed in the "Factors Affecting Future Results" section of our Annual Report on Form 10-K for the fiscal year ended April 2, 2006, all quarterly reports on Form 10-Q for the following fiscal quarters, all subsequent current reports on Form 8-K and our prior press releases. All forward-looking statements in this press release are based on information available to us as of the date hereof, and we assume no duty to update these forward-looking statements.

Note: Opti-Probe is registered trademark of Therma-Wave, Inc.

Joe Passarello, 510-668-2200

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