Self-Compensating Design for Focus Variation - Technical Paper from DAC 2005

Blaze DFM Inc.

Paper by Puneet Gupta, Andrew B. Kahng, Youngmin Kim , and Dennis Sylvester.

Process variations have become a bottleneck for predictable and highyielding IC design and fabrication. Linewidth variation (∆L) due to defocus in a chip is largely systematic after the layout is completed, i.e., dense lines “smile” through focus while isolated (iso) lines “frown”. In this paper, we propose a design flow that allows explicit compensation of focus variation, either within a cell (self-compensated cells) or across cells in a critical path (self-compensated design). Assuming that iso and dense variants are available for each library cell, we achieve designs that are more robust to focus variation. Design with a self-compensated cell library incurs ~11-12% area penalty while compensating for focus variation. Across-cell optimization with a mix of dense and iso cell variants incurs ~6-8% area overhead compared to the original cell library, while meeting timing constraints across a large range of focus variation (from 0 to 0.4um). A combination of original and iso cells provides an even better self-compensating design option, with only 1% area overhead. Circuit delay distributions are tighter with self-compensated cells and self-compensated design than with a conventional design methodology.


Read the complete story ...


Review Article Be the first to review this article

Aldec Simulator Evaluate Now

Featured Video
Jobs
Acoustic Systems Test Engineer for Cirrus Logic, Inc. at Austin, TX
Senior DSP Firmware Engineer for Cirrus Logic, Inc. at Austin, TX
Principal PIC Hardware Controls Engineer for Infinera Corp at Sunnyvale, CA
Design Verification Engineer for intersil at Morrisville, NC
Applications Engineer for intersil at Palm Bay, FL
ASIC Design Engineer for Infinera Corp at Sunnyvale, CA
Upcoming Events
Essentials of Electronic Technology: A Crash Course at Columbia MD - Jan 16 - 18, 2018
Essentials of Digital Technology at MD - Feb 13 - 14, 2018
IPC APEX EXPO 2018 at San Diego Convention Center San Diego CA - Feb 24 - 1, 2018
CST: Webinar series



Internet Business Systems © 2017 Internet Business Systems, Inc.
25 North 14th Steet, Suite 710, San Jose, CA 95112
+1 (408) 882-6554 — Contact Us, or visit our other sites:
AECCafe - Architectural Design and Engineering TechJobsCafe - Technical Jobs and Resumes GISCafe - Geographical Information Services  MCADCafe - Mechanical Design and Engineering ShareCG - Share Computer Graphic (CG) Animation, 3D Art and 3D Models
  Privacy PolicyAdvertise