Chandler, AZ -- June 16, 2016 - Axus Technology of Chandler, Arizona is pleased to introduce the G&P POLI-1300PCB Planarization Tool for large format substrates greater than 500mm on a side. The POLI-1300PCB was developed to address the growing requirement for inter-layer planarization of dielectric, epoxy, and metal films on large format substrates, including fan-out boards and similar products.
The tool includes automated process controls and the large format carrier and platen needed to planarize these large substrates. The temperature-controlled platen also supports through-the-table slurry delivery, ensuring efficient delivery and slurry usage.
The POLI-1300PCB is manufactured by G&P Technology in Korea and distributed in North America by Axus Technology. Process demonstrations are available in Axus' Chandler, AZ facility.
"Where we have previously custom-configured CMP tools for large substrate applications, the G&P POLI-1300PCB is specifically designed for the application, making it a much more efficient platform," says Dr. Peter Wrschka, Axus Technology's Director of Process Technology. "The POLI-1300PCB builds on well-established methods of CMP process technology adapted to deliver improved uniformity and repeatability for these large substrates."
About Axus Technology
Axus Technology provides surface processing solutions for a range of semiconductor, MEMS, substrate, and related technologies. With a highly experienced engineering team, Axus Technology applies proven process technology to the production and development of CMP processes, advanced substrate development, and advanced packaging applications including 3-D integration and through-silicon-via processes. Along with providing support services for existing tools, Axus Technology delivers economical leading-edge equipment and process solutions that are precisely configured for end-user applications. Axus Technology is the North American distributor for G&P Technology.
Based in Chandler, Arizona, Axus Technology operations include a fully-equipped development and foundry processing facility, as well as design, manufacturing, and worldwide service and parts support. For more information visit our website at www.AxusTech.com.
About G&P Technology
Founded in 1999, G&P Technology has dedicated its resources and efforts to providing Universities, R&D Organizations, & MEMS companies with precise and affordable Chemical Mechanical Polishing (CMP) systems and services. G&P Technology works with CMP laboratories in Asia, Europe and the US including many CMP labs in universities and MEM's R&D fabs and performs government and private research projects. More than 100 G&P systems have been installed for research and development around the world.
For more information visit our website at www.GnPTech.com.