Ø20mm x 10mm Mini Ultrasonic Piezo Rotary Stage with Integrated Encoder, Created by PI

March 2016, Auburn, MA - Precision motion and nanopositioning systems specialist PI (Physik Instrumente) L.P. recently released the latest smallest member in their miniature rotary stage series with ultrasonic piezo motor drives. The U-622 is joining 2 other high dynamics miniaturized ultrasonic rotary positioners, U-624 and U-628. Vacuum compatible versions to 10-6 hPa are available. 

Very Stable, Very Fast, Very Dynamic

Small, fast, and self-locking without the need of a brake, the U-62x’s ultrasonic piezomotors are superior positioners that reach velocities of up to 720 °/second. Due to the self-locking ceramic motor, no heat is generated at rest. The compact design with widths of 20, 30 or 50 mm and height of only 10, 12 or 19 mm allows for easy integration into tight spaces of existing applications. With a rotation range of 360° and very quiet operation, the stages excel by their extreme dynamic range and very quick step and settle. 


A piezo ceramic ring motor directly drives the rotating platform eliminating the need for mechanical components, such as worms, pinions and gears, reducing inertia, size, and wear, while at the same time increasing reliability. The U-62x series comes with integrated, direct-measuring, incremental encoders that ensure resolution down to 1/1000th degree and reliable position control and repeatability.

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Specifications, Datasheet, More Information


Standard and Custom

PI has in-house engineered solutions with over 4 decades of experience working with customers to provide products that meet application demands, and can quickly modify existing product designs or provide a fully customized OEM part to fit the exact requirements of the application. 

Download Miniature Precision Positioning Stages Catalog


Application Examples of the U-62x Series

Precision positioning and alignment of samples in research and OEM applications. Fields of applications include automation, photonics, bio-nano-technology, metrology, microscopy, life sciences, micro-manipulation, including cleanroom applications. 

Features & Advantages

  • 360° Rotation Range
  • Self-Clamping Ultrasonic Motor, No Jitter/Drift, No Holding Current
  • Ultra-Compact: 20mm Wide, 10mm High
  • 720°/sec Max. Velocity
  • Vacuum Option

About PI

PI is a leading manufacturer of precision motion control equipment, piezo motors, air bearing stages and hexapod parallel-kinematics for semiconductor applications, photonics, bio-nano-technology and medical engineering. PI has been developing and manufacturing standard & custom precision products with piezoceramic and electromagnetic drives for 4 decades. The company has been ISO 9001 certified since 1994 and provides innovative, high-quality solutions for OEM and research. PI is present worldwide with twelve subsidiaries, R&D / engineering on 3 continents and total staff of 850.


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