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Title : Tanner’s L-Edit and T-Cells drive productivity and speed to market
Company : Tanner EDA
Date : 21-Jan-2013
Downloads : 1

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Micro-electromechanical systems (MEMS) represent a highly cost-effective way of building tiny sensors and actuators. But a major problem with MEMS devices is that they need to be hermetically sealed: a level of protection much higher than that generally used for integrated-circuit packaging. As they can measure as little as 1mm on a side, handling MEMS devices is extremely difficult and the use of conventional packaging techniques can damage the delicate MEMS structures. The alternative is to perform packaging at the wafer level.
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