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Title : A Practical Approach to Process Corner Models of Interconnect RC Extraction
Company : National Semiconductor Corporation
File Name : jiang_final.pdf
Size : 84649
Type : application/pdf
Date : 05-Oct-2006
Downloads : 56

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Compared to the well-defined C-only process corner models, the situation of RC process corner models is much more complicated: they are controversial, not well-defined and even design dependent. In the designs using currently advanced technologies, coupling capacitance between wires on the same metal layer is dominant (usually more than 70% to 80% of the total capacitance). The dependency of this coupling capacitance on metal thickness and width is almost exactly opposite to the metal resistance, resulting in very little change of R*C even when R and C have individually changed significantly. This paper will describe how National successfully dealt with the process corner models of RC extraction in several designs with 0.13ì m technology and how the advanced features introduced in the latest StarRCXT versions facilitated our methodology implementation. Our experience showed that rigid uniform parasitic corner models similar to STA approach should NOT be used. In stead, with the same technology, different designs may need different parasitic corner models. Furthermore even in the same design, analog parasitic corner models could be different from its digital counterparts. Using the StarRCXT ITF file as an example, the paper will also show why and how some systematic dependences, such as metal width dependency on spacing, metal thickness dependency on density, etc, should be combined with the process variation corners, in order to make the RC corner models better reflect real silicon. The paper will share our success experience as well as our lessons with the Synopsys tool users’ community.
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I am working on how to model the ITF file for shallow trench isolation hence I am looking for the docs which will help me - prashant - Report As Inappropriate

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