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Title : Electromagnetic Release Process for Flexible Electronics
Company : Comsol
Date : 27-Mar-2014
Downloads : 2

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Featured Paper by G. Coryell

Flexible electronics are temporarily affixed to a rigid carrier such as glass or silicon prior to device fabrication to facilitate robotic handling of the device, but also to allow optical lithography to stay within overlay design registration budget; without the rigid carrier, a freestanding flexible substrate such as polyimide would distort unacceptably during even minor temperature excursions due to its high coefficient of thermal expansion. Post fabrication the device must be released from its temporary carrier. Others have used UV-release of a temporary adhesive (bond-debond) [1], solvent release [2], backside laser ablation [3], backside sacrificial grinding, backside wet chemical [4,5] and plasma etching [4], mechanical separation [2], and thermal release [2] to affect this release. Each release technique possesses one or more significant disadvantages, including added cost, added processing time, limited throughput, added processing steps, and increased opportunity to introduce defects to a nearly finished device.
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