|
Featured Paper by Andrew B. Kahng, Chul-Hong Park, Puneet Sharma and Qinke Wang Process variations due to lens aberrations are to a large extent systematic, and can be modeled for purposes of analyses and optimizations in the design phase. Traditionally, variations induced by lens aberrations have been considered random due to their small extent. However, as process margins reduce, and as improvements in reticle enhancement techniques control variations due to other sources with increased efficacy, lens aberration induced variations gain importance.
|
||||||
|
||||||
|
||||||
